V5 Wafer Level Automatic Optical Inspection and Measurement Equipment

V5200/V5300 Pro

The world’s first automatic optical microscope inspection equipment V5200/V5300 Pro offers fully automatic macroscopic and microscopic inspection and measurement, satisfy wafer front-side and back-side inspection, and no longer traditionally manual operation with identification through human eyes. V5 has been certified by a number of advanced OSAT packaging plants. Our system supports online ASI, ACI, ADI, AEI, APDI, API, and ASTI testing and measurement and offline analysis.

 

Equipment capability

  1. It is used to inspect “8 and 12” (200mm/300mm) wafers.
  2. Wafer warpage handling capability is +/-7mm.
  3. Macro inspection “zero” blind spot to detect defects on the front-side and back-side of wafer.
  4. Microscopic inspection offers multiple magnifications. 6 magnifications are available: 2X, 5X, 10X, 20X, 50X and 100X, with resolution range 0.055um ~ 2.75um.
  5. Bump CD/line width/overlap/EBR/WEE measurement stability is within 1 pixel deviation.
  6. Multi-function settings to meet all quality assurance specifications.
  7. Online and offline software review
  8. The inspection results output in KLARF or SINF files according to specifications, including the coordinate information of the front-side of the wafer corresponding to the back-side defects.
  9. FAB automation support (OHT + SECS/GEM)
  10. Intelligent AI ADC software