V5 OM automation upgrade solution is to upgrade manual or semi-automatic OM tools to fully automatic. It is also the world's first and only upgrade solution for fully automatic optical microscope. Through the fully automatic optical inspection program, all inspections can be standardized and tracked to improve quality management. This is one of the necessary conditions to realize unmanned factory and Industry 4.0.
Program capability
- It can be equipped with integrated and upgraded brands and models: Nikon OST3100/3200 and Olympus Al3300/3320.
- Macroscopic automatic picture-taking provides wafer images for offline defect review.
- Microscopic automatic picture-taking provides wafer images for offline defect review.
- Microscopic automatic measurement Bump CD/line width/overlap/EBR/WEE measurement stability is within 1 pixel deviation.
- Multi-function settings to meet all quality assurance specifications.
- Online and offline software review
- FAB automation support (OHT + SECS/GEM)
- Intelligent AI ADC software